Passer le menu
Version française

Customer section | Press section | Recruitment section | Extranet

Home > Research > Scientific metrology > Dimensional metrology > Dimensional nanometrology

Dimensional nanometrology

LNE is developing a new reference metrology activity to satisfy a range of needs in nanometric dimensional metrology.


Measuring at nanometric scale

Reference

1 nm = 10-9 m
= 0,000000001 m

Over the last 20 years, extensive R&D work has been carried out worldwide in nanosciences and nanotechnologies. It has reached a level where new concepts, objects and materials stemming from this research are finding applications in fields as varied as transport, communications, the environment, health and energy sources.

Definition

"Nanodimensional metrology is the science and practice of measuring the dimensions of objects, distances and displacements within a range of 1 to 1,000 nm."

To meet these strategic challenges and reap the potentially enormous medium-term economic benefits, new tools must be developed that can mass produce nanometric-scale systems to a very high level of reliability. At the same time production costs must be controlled. The technological constraints already identified in fields such as microelectronics - where patterns under100 nm are lithographed - clearly show that the metrology function in future production units must be specifically adapted to the use of new measuring instruments and methods on a nanometric scale.

LNE extends its scope to nanometrology

In order to fulfil its public service mission by providing French industry with reference metrology support, LNE is developing a new reference metrology activity to satisfy a range of needs in nanometric dimensional metrology. Its Nanometrology project aims to:

  • provide a measurement capability for reference standards traceable to the national standard of length
  • meet different needs according to the type of standard, the type of measurement and the corresponding degree of uncertainty
  • contribute to the development of future reference standards adapted to industrial requirements and to the drafting of international normative documents
  • cooperate with other European national metrology laboratories in order to pool and expand knowledge and share it with companies
  • offer a measurement capability for characterization of advanced products
  • · develop expertise in technologies that will be essential for submicrometric dimensional measurement applied to other fields of metrology.

Technical capabilities involved

  • High precision mechanical design
  • Nanopositioning:
    - capacitive sensors
    - piezoelectric actuators
    - two-dimensional linear optical encoders
    - interferometry
    - position servo control
  • Insulation against thermal perturbation and vibration
  • Finite-element modelling of mechanical behaviour
  • LabVIEW programming
  • Estimation and control of measurement uncertainties.

Publications

  • POYET B., DUCOURTIEUX S., LAHOUSSE L., DAVID J., LELEU S., "Development of the LNE metrological AFM", Nanoscale ; 2008 ; 8th seminar on quantitative microscopy QM and 4th seminar on nanoscale calibration standards and methods ; 22-23 septembre ; Torino ; Italy
  • POYET B., DUCOURTIEUX S., DAVID J., LAHOUSSE L., LELEU S., "Development of a new high guidance quality XYZ flexure scanner for the LNE metrological AFM", Nanoscale ; 2008 ; 8th seminar on quantitative microscopy QM and 4th seminar on nanoscale calibration standards and methods ; 22-23 septembre ; Torino ; Italy
  • MATUS M., PRIETO E., BALLING P., KRUGER O., HALD J., PICOTTO G., DUCOURTIEUX S., MELI F., LASSILA A., PIREE H., FIRA R., JOHANSSON R., YANDAYAN T., "Interferometric calibration of nanometric displacement actuators", Nanoscale ; 2008 ; 8th seminar on quantitative microscopy QM and 4th seminar on nanoscale calibration standards and methods ; 22-23 septembre ; Torino ; Italy
  • POYET B., DUCOURTIEUX S., DAVID J., LAHOUSSE L., LELEU S. "Development of a new XY flexure translation stage with high guidance quality for the LNE metrological AFM", Euspen ; 2008 ; European Society for precision engineering and nanotechnology ; Zurich ; 18-22 may
  • POYET B., DUCOURTIEUX S., LARSONNIER F., DAVID J. , "Développement d'un AFM dont les mesures sont traçables au mètre-étalon", Forum microscopie en champ proche ; 2007 ; Troyes ; 10ème forum des microscopies ; 26-29 mars

Contact

Sébastien Ducourtieux
Tel : (33) 1 30 69 21 84

LNE - DMSI - 385
29 rue Roger Hennequin
78197 TRAPPES Cedex